For wiretaps:::

AT&T, for example, imposes a $325 "activation fee" for each wiretap and $10 a day to maintain it. Smaller carriers Cricket and U.S. Cellular charge only about $250 per wiretap. But snoop on a Verizon customer? That costs the government $775 for the first month and $500 each month after that, according to industry disclosures made last year to Congressman Edward Markey.

but how much do they make by aiding the government's spying on us?

To discourage gratuitous requests and to prevent losing money, industry turned to a section of federal law that allows companies to be reimbursed for the cost of "searching for, assembling, reproducing and otherwise providing" communications content or records on behalf of the government. The costs must be "reasonably necessary" and "mutually agreed" upon with the government.

Discourage gratuitous requests? That is funny..  it does not appear that the government is looking to cut costs on its spying programs, nor is the government looking to be more selective in their gathering of private communications of people on the internet

..phone companies developed detailed fee schedules and began billing law enforcement much as they do customers.....The ACLU's Soghoian found in 2009 that Sprint had created a website allowing law enforcement to track the location data of its wireless customers for only $30 a month to accommodate the approximately 8 million requests it received in one year.

$30/month for 8 million requests???   $240 million?

...the fees can add up quickly. The average wiretap is estimated to cost $50,000, a figure that includes reimbursements as well as other operational costs. One narcotics case in New York in 2011 cost the government $2.9 million alone.